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Guide to Microscopes and Microanalysis

Electron Backscatter Diffraction EBSD

Manufacturers of EBSD

microanalysis systems for SEM  X-rayHKL Channel 5 is a research grade Electron Backscatter Diffraction system, now available with the NordlysF 400 camera achieving a 99% indexing hit rate at 400Hz on nickel. Contact Oxford Instruments.

EBSDOIM™ - Orientation Imaging Microscopy, the most powerful automated EBSD system for analysis of crystalline microstructures. EDAX introduces the Hikari high speed, high sensitivity CCD detector which collects 200 indexed patterns per second. Available stand alone, with simultaneous EDS, or integrated EDS & WDX. Contact EDAX Inc.

What is EBSD?

Electron Backscatter Diffraction (EBSD) obtains crystallographic information from tilted polished samples samples in a scanning electron microscope (SEM). The electron beam strikes the sample and the electrons are elastically scatter beneath the surface. Electrons diffracted according to Bragg's law form a pattern on a fluorescent screen. Each lattice plane is represented in the diffraction pattern by a Kikuchi band. By comparing to theoretical data, the crystallographic system of the material and orientation can be determined.

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